发明申请
US20100270554A1 METHOD OF REFORMING A METAL PATTERN, ARRAY SUBSTRATE, AND METHOD OF MANUFACTURING THE ARRAY SUBSTRATE
审中-公开
改进金属图案的方法,阵列基板以及制造阵列基板的方法
- 专利标题: METHOD OF REFORMING A METAL PATTERN, ARRAY SUBSTRATE, AND METHOD OF MANUFACTURING THE ARRAY SUBSTRATE
- 专利标题(中): 改进金属图案的方法,阵列基板以及制造阵列基板的方法
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申请号: US12625096申请日: 2009-11-24
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公开(公告)号: US20100270554A1公开(公告)日: 2010-10-28
- 发明人: Sun-Young HONG , Hong-Sick Park , Shi-Yul Kim , Bong-Kyun Kim , Young-Joo Choi , Byeong-Jin Lee , Jong-Hyun Choung , Dong-Ju Yang , Hyun-Young Jung
- 申请人: Sun-Young HONG , Hong-Sick Park , Shi-Yul Kim , Bong-Kyun Kim , Young-Joo Choi , Byeong-Jin Lee , Jong-Hyun Choung , Dong-Ju Yang , Hyun-Young Jung
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR2009-36972 20090428
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; B44C1/22 ; H01L21/4763
摘要:
A method of reforming a metal pattern for improving the productivity and reliability of a manufacturing process, an array substrate and a method of manufacturing the array substrate are disclosed. In the method, a first wiring pattern is formed on an insulation substrate. The first wiring pattern is removed. A second wiring pattern is formed on an embossed pattern by using the embossed pattern as an alignment mask. The embossed pattern is defined by a recess formed on a surface of the insulation substrate. Accordingly, the insulation substrate having the recess formed thereon may not be discarded, and may be reused in forming the first wiring pattern. In addition, the embossed pattern defined by the recess is used as an alignment mask, so that the alignment reliability of a metal pattern may be improved.
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