发明申请
- 专利标题: SILICON BIOSENSOR AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 硅生物传感器及其制造方法
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申请号: US12746247申请日: 2008-06-20
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公开(公告)号: US20100278694A1公开(公告)日: 2010-11-04
- 发明人: Chul Huh , Kyung Hyun Kim , Jong Cheol Hong , Hyun Sung Ko , Wan Joong Kim , Gun Yong Sung , Seon Hee Park
- 申请人: Chul Huh , Kyung Hyun Kim , Jong Cheol Hong , Hyun Sung Ko , Wan Joong Kim , Gun Yong Sung , Seon Hee Park
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 优先权: KR10-2007-0127882 20071210
- 国际申请: PCT/KR08/03543 WO 20080620
- 主分类号: G01N21/00
- IPC分类号: G01N21/00 ; H01L21/70
摘要:
A silicon biosensor and a manufacturing method thereof is provided, the silicon biosensor includes: a light source performing self emission a light detector generating a photoelectric current corresponding to an amount of incident light an optical fiber transmitting the light from the light source to the light detector and a micro fluidic channel adjusting an optical transmission rate of the optical fiber according to an antibody-antigen reaction when the antibody-antigen reaction occurs. The silicon biosensor can be easily integrated or bonded with a silicon electronic device, so that it is possible to manufacture the biosensor with a low price, under mass production.
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