发明申请
US20100278694A1 SILICON BIOSENSOR AND MANUFACTURING METHOD THEREOF 审中-公开
硅生物传感器及其制造方法

SILICON BIOSENSOR AND MANUFACTURING METHOD THEREOF
摘要:
A silicon biosensor and a manufacturing method thereof is provided, the silicon biosensor includes: a light source performing self emission a light detector generating a photoelectric current corresponding to an amount of incident light an optical fiber transmitting the light from the light source to the light detector and a micro fluidic channel adjusting an optical transmission rate of the optical fiber according to an antibody-antigen reaction when the antibody-antigen reaction occurs. The silicon biosensor can be easily integrated or bonded with a silicon electronic device, so that it is possible to manufacture the biosensor with a low price, under mass production.
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