发明申请
US20100319151A1 CLEANING SHEET, CONVEYING MEMBER USING THE SAME, AND SUBSTRATE PROCESSING EQUIPMENT CLEANING METHOD USING THEM
审中-公开
使用它们的清洁片，输送构件和使用它们的基板处理设备清洁方法
- 专利标题： CLEANING SHEET, CONVEYING MEMBER USING THE SAME, AND SUBSTRATE PROCESSING EQUIPMENT CLEANING METHOD USING THEM
- 专利标题（中）： 使用它们的清洁片，输送构件和使用它们的基板处理设备清洁方法
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申请号： US12851797申请日： 2010-08-06
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公开(公告)号： US20100319151A1公开(公告)日： 2010-12-23
- 发明人: Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
- 申请人： Makoto Namikawa , Yoshio Terada , Jirou Nukaga , Eiji Toyoda , Hirofumi Fujii , Daisuke Uenda , Asami Funatsu , Nobuaki Maruoka , Hitoshi Ishizaka , Yasuhiro Amano
- 申请人地址： JP Osaka
- 专利权人： NITTO DENKKO CORPORATION
- 当前专利权人： NITTO DENKKO CORPORATION
- 当前专利权人地址： JP Osaka
- 优先权： JP2000-168423 20000606; JP2000-177963 20000614; JP2000-177964 20000614; JP2000-230339 20000731; JP2000-243752 20000811; JP2000-349840 20001116; JP2001-004634 20010112; JP2003-424547 20031222; JP2004-004512 20040109; JP2004-183788 20040622
- 主分类号： A47L25/00
- IPC分类号： A47L25/00
摘要：
A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
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