A barrier layer deposited on the passivation layer of a semiconductor die decreases adhesion of glue used during stacking of semiconductor dies by altering chemical or structural properties of the passivation layer. During detachment of a carrier wafer from a wafer, the barrier layer reduces glue residue on the wafer by modifying the surface of the passivation layer. The barrier layer may be insulating films such as silicon dioxide, silicon nitride, silicon carbide, polytetrafluoroethylene, organic layers, or epoxy and may be less than two micrometers in thickness. Additionally, the barrier layer may be used to reduce topography of the semiconductor die to decrease adhesion of glues.