发明申请
- 专利标题： Near-Infrared Absorbing Film Compositions
- 专利标题（中）： 近红外吸收膜组合物
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申请号： US12542970申请日： 2009-08-18
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公开(公告)号： US20110042771A1公开(公告)日： 2011-02-24
- 发明人: Wu-Song Huang , Martin Glodde , Dario L. Goldfarb , Wai-Kin Li , Sen Liu , Libor Vyklicky
- 申请人： Wu-Song Huang , Martin Glodde , Dario L. Goldfarb , Wai-Kin Li , Sen Liu , Libor Vyklicky
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L31/0216
- IPC分类号： H01L31/0216 ; G03F7/004 ; G03F7/20
摘要：
A curable liquid formulation comprising: (i) one or more near-infrared absorbing polymethine dyes; (ii) one or more crosslinkable polymers; and (iii) one or more casting solvents. The invention is also directed to solid near-infrared absorbing films composed of crosslinked forms of the curable liquid formulation. The invention is also directed to a microelectronic substrate containing a coating of the solid near-infrared absorbing film as well as a method for patterning a photoresist layer coated on a microelectronic substrate in the case where the near-infrared absorbing film is between the microelectronic substrate and a photoresist film.
公开/授权文献
- US08772376B2 Near-infrared absorbing film compositions 公开/授权日：2014-07-08
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