发明申请
- 专利标题: SEMICONDUCTOR TESTING CIRCUIT, SEMICONDUCTOR TESTING JIG, SEMICONDUCTOR TESTING APPARATUS, AND SEMICONDUCTOR TESTING METHOD
- 专利标题(中): 半导体测试电路,半导体测试仪,半导体测试仪器和半导体测试方法
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申请号: US12873738申请日: 2010-09-01
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公开(公告)号: US20110057681A1公开(公告)日: 2011-03-10
- 发明人: Yuichi Watanabe , Kiyotaka Shinada , Yuushin Kimura , Shigeru Goto , Yasuhiko Tandou , Eiji Takada , Kouji Uesaka
- 申请人: Yuichi Watanabe , Kiyotaka Shinada , Yuushin Kimura , Shigeru Goto , Yasuhiko Tandou , Eiji Takada , Kouji Uesaka
- 申请人地址: JP Kawasaki-shi JP Yokohama-shi
- 专利权人: FUJITSU LIMITED,FUJITSU SEMICONDUCTOR LIMITED
- 当前专利权人: FUJITSU LIMITED,FUJITSU SEMICONDUCTOR LIMITED
- 当前专利权人地址: JP Kawasaki-shi JP Yokohama-shi
- 优先权: JP2009-204549 20090904
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
A signal processing section included in a semiconductor testing circuit supplies a test signal inputted from a tester via a signal line to a plurality of DUTs and generates a test result by synthesizing response signals transmitted from the plurality of DUTs on the basis of the test signal. A test result output section included in the semiconductor testing circuit makes a voltage level of the test result differ from a voltage level of the test signal inputted and outputs the test result to the tester via the signal line.
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