发明申请
- 专利标题: DEVICE FABRICATED USING AN ELECTROPLATING PROCESS
- 专利标题(中): 使用电镀工艺制作的器件
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申请号: US12611609申请日: 2009-11-03
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公开(公告)号: US20110101532A1公开(公告)日: 2011-05-05
- 发明人: Jens Pohl , Hans-Joachim Barth , Gottfried Beer , Rainer Steiner , Werner Robl , Mathias Vaupel
- 申请人: Jens Pohl , Hans-Joachim Barth , Gottfried Beer , Rainer Steiner , Werner Robl , Mathias Vaupel
- 申请人地址: DE Neubiberg
- 专利权人: INFINEON TECHNOLOGIES AG
- 当前专利权人: INFINEON TECHNOLOGIES AG
- 当前专利权人地址: DE Neubiberg
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H05K1/00 ; C25D5/00 ; C25D5/34
摘要:
A method for fabricating a device includes providing a substrate including at least one contact and applying a dielectric layer over the substrate. The method includes applying a first seed layer over the dielectric layer, applying an inert layer over the seed layer, and structuring the inert layer, the first seed layer, and the dielectric layer to expose at least a portion of the contact. The method includes applying a second seed layer over exposed portions of the structured dielectric layer and the contact such that the second seed layer makes electrical contact with the structured first seed layer. The method includes electroplating a metal on the second seed layer.
公开/授权文献
- US08334202B2 Device fabricated using an electroplating process 公开/授权日:2012-12-18
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