On-chip RF shields with through substrate conductors
    6.
    发明授权
    On-chip RF shields with through substrate conductors 有权
    片上RF屏蔽通过基板导体

    公开(公告)号:US08169059B2

    公开(公告)日:2012-05-01

    申请号:US12242521

    申请日:2008-09-30

    IPC分类号: H01L23/552

    摘要: Structures of a system on chip and methods of forming a system on chip are disclosed. In one embodiment, the system on a chip includes an RF component disposed on a first part of a substrate, a semiconductor component disposed on a second part of the substrate, the semiconductor component and the RF component sharing a common boundary. The system on chip further includes through substrate conductors disposed in the substrate, the through substrate conductors coupled to a ground potential node, the through substrate conductors disposed around the RF component forming a fence around the RF circuit.

    摘要翻译: 公开了一种片上系统的结构以及片上系统的形成方法。 在一个实施例中,芯片上的系统包括设置在基板的第一部分上的RF部件,设置在基板的第二部分上的半导体部件,共享公共边界的半导体部件和RF部件。 芯片上的系统还包括通过设置在基板中的基板导体,连接到地电位节点的贯穿基板导体,围绕RF元件设置的贯穿基板导体,围绕RF电路形成围栏。