发明申请
- 专利标题: METHOD AND DEVICE FOR TESTING TSVS IN A 3D CHIP STACK
- 专利标题(中): 用于在3D芯片堆栈中测试TSVS的方法和装置
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申请号: US12891658申请日: 2010-09-27
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公开(公告)号: US20110102011A1公开(公告)日: 2011-05-05
- 发明人: Geert Van der Plas , Erik-Jan Marinissen , Nikolaos Minas , Paul Marchal
- 申请人: Geert Van der Plas , Erik-Jan Marinissen , Nikolaos Minas , Paul Marchal
- 申请人地址: BE Leuven
- 专利权人: IMEC
- 当前专利权人: IMEC
- 当前专利权人地址: BE Leuven
- 优先权: EP09172258.7 20091005
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; H01L23/528
摘要:
A method and device for testing through-substrate vias (TSVs) in a 3D chip stack are disclosed. In one aspect, the 3D chip stack includes at least a first die having a first electrical circuit and a second die having a second electrical circuit. The first die further includes at least one first TSV for providing electrical connection between the first electrical circuit and the second electrical circuit. The first die further includes test circuitry and at least one second TSV electrically connected between the first TSV and the test circuitry. The electrical connection between the first TSV and the second TSV is made outside the second die. In one aspect, this allows testing the first TSV in the first die even if the second die is not provided with dedicated test circuitry.
公开/授权文献
- US08593170B2 Method and device for testing TSVS in a 3D chip stack 公开/授权日:2013-11-26
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