发明申请
- 专利标题: ADVANCED TRANSISTORS WITH PUNCH THROUGH SUPPRESSION
- 专利标题(中): 先进的晶体管通过抑制通过PUNCH
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申请号: US12895813申请日: 2010-09-30
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公开(公告)号: US20110121404A1公开(公告)日: 2011-05-26
- 发明人: Lucian Shifren , Pushkar Ranade , Paul E. Gregory , Sachin R. Sonkusale , Weimin Zhang
- 申请人: Lucian Shifren , Pushkar Ranade , Paul E. Gregory , Sachin R. Sonkusale , Weimin Zhang
- 主分类号: H01L29/772
- IPC分类号: H01L29/772 ; H01L21/336
摘要:
An advanced transistor with punch through suppression includes a gate with length Lg, a well doped to have a first concentration of a dopant, and a screening region positioned under the gate and having a second concentration of dopant. The second concentration of dopant may be greater than 5×1018 dopant atoms per cm3. At least one punch through suppression region is disposed under the gate between the screening region and the well. The punch through suppression region has a third concentration of a dopant intermediate between the first concentration and the second concentration of dopant. A bias voltage may be applied to the well region to adjust a threshold voltage of the transistor.
公开/授权文献
- US08421162B2 Advanced transistors with punch through suppression 公开/授权日:2013-04-16
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