发明申请
- 专利标题: SEMICONDUCTOR DEVICE INCLUDING CARBON-CONTAINING ELECTRODE AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 包含含碳电极的半导体器件及其制造方法
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申请号: US12648337申请日: 2009-12-29
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公开(公告)号: US20110128667A1公开(公告)日: 2011-06-02
- 发明人: Kwan-Woo Do , Kee-Jeung Lee , Young-Dae Kim , Mi-Hyoung Lee , Jeong-Yeop Lee
- 申请人: Kwan-Woo Do , Kee-Jeung Lee , Young-Dae Kim , Mi-Hyoung Lee , Jeong-Yeop Lee
- 优先权: KR10-2009-0117394 20091130
- 主分类号: H01G4/008
- IPC分类号: H01G4/008 ; H01L29/43 ; H01L21/71 ; B05D5/12 ; C23C16/513
摘要:
In a semiconductor device including a carbon-containing electrode and a method for fabricating the same, an electrode has a high work function due to a carbon-containing TiN layer contained therein. It is possible to provide a dielectric layer having a high permittivity and thus to reduce the leakage current by forming an electrode having a high work function. Also, sufficient capacitance of a capacitor can be secured by employing an electrode having a high work function and a dielectric layer having a high permittivity.
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