发明申请
US20110129618A1 VERTICAL FILM FORMATION APPARATUS AND METHOD FOR USING SAME 有权
垂直膜形成装置及其使用方法

VERTICAL FILM FORMATION APPARATUS AND METHOD FOR USING SAME
摘要:
A method for using a vertical film formation apparatus includes performing a coating process inside the process container without product target objects present therein to cover an inner surface of the process container with a coating film, and then performing a film formation process inside the process container accommodating the holder with the product target objects placed thereon to form a predetermined film on the product target objects. The coating process alternately supplies the first and second process gases into the process container without turning either of the first and second process gases into plasma. The film formation process alternately supplies the first and second process gases into the process container while turning at least one of the first and second process gases into plasma.
公开/授权文献
信息查询
0/0