发明申请
US20110146401A1 ANGULAR VELOCITY SENSOR AND ELECTRONIC APPARATUS 审中-公开
角速度传感器和电子设备

ANGULAR VELOCITY SENSOR AND ELECTRONIC APPARATUS
摘要:
Provided is an angular velocity sensor including a first vibration element, a second vibration element, and a support substrate. The first vibration element detects a first angular velocity about an axis parallel to a first direction. The second vibration element detects a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction, and generates an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction. The support substrate supports the first vibration element and the second vibration element.
信息查询
0/0