发明申请
- 专利标题: ANGULAR VELOCITY SENSOR AND ELECTRONIC APPARATUS
- 专利标题(中): 角速度传感器和电子设备
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申请号: US12968700申请日: 2010-12-15
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公开(公告)号: US20110146401A1公开(公告)日: 2011-06-23
- 发明人: Teruo Inaguma , Junichi Honda , Takanori Aoto , Koki Hino , Kazuo Takahashi , Hiroshi Onuma
- 申请人: Teruo Inaguma , Junichi Honda , Takanori Aoto , Koki Hino , Kazuo Takahashi , Hiroshi Onuma
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JPP2009-290504 20091222
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
Provided is an angular velocity sensor including a first vibration element, a second vibration element, and a support substrate. The first vibration element detects a first angular velocity about an axis parallel to a first direction. The second vibration element detects a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction, and generates an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction. The support substrate supports the first vibration element and the second vibration element.
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