公开(公告)号：US20110146401A1

公开(公告)日：2011-06-23

申请号：US12968700

申请日：2010-12-15

申请人： Teruo Inaguma ,  Junichi Honda ,  Takanori Aoto ,  Koki Hino ,  Kazuo Takahashi ,  Hiroshi Onuma

发明人： Teruo Inaguma ,  Junichi Honda ,  Takanori Aoto ,  Koki Hino ,  Kazuo Takahashi ,  Hiroshi Onuma

IPC分类号： G01C19/56

CPC分类号： G01C19/5628

摘要： Provided is an angular velocity sensor including a first vibration element, a second vibration element, and a support substrate. The first vibration element detects a first angular velocity about an axis parallel to a first direction. The second vibration element detects a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction, and generates an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction. The support substrate supports the first vibration element and the second vibration element.

摘要翻译： 提供了包括第一振动元件，第二振动元件和支撑基板的角速度传感器。 第一振动元件围绕平行于第一方向的轴线检测第一角速度。 第二振动元件检测围绕平行于与第一方向倾斜相交的第二方向的轴的第二角速度，并且产生对应于平行于与第一方向正交的第三方向的轴的第三角速度的输出信号。 支撑基板支撑第一振动元件和第二振动元件。

公开(公告)号：US07583012B2

公开(公告)日：2009-09-01

申请号：US11367996

申请日：2006-03-03

申请人： Eiji Nakashio ,  Junichi Honda ,  Takashi Tamura ,  Koji Suzuki ,  Teruo Inaguma ,  Manabu Aizawa ,  Kazuo Takahashi ,  Tadashi Sakurai

发明人： Eiji Nakashio ,  Junichi Honda ,  Takashi Tamura ,  Koji Suzuki ,  Teruo Inaguma ,  Manabu Aizawa ,  Kazuo Takahashi ,  Tadashi Sakurai

IPC分类号： H01L41/08

CPC分类号： G01C19/5663 ,  H01L41/094 ,  H01L41/316 ,  Y10T29/42 ,  Y10T29/49155

摘要： There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

摘要翻译： 需要能够在不损害压电特性的情况下提高生产率和产量的压电元件及其制造方法。 压电元件设置有基板，设置在基板上的第一电极膜，设置在第一电极膜上的压电膜和设置在压电膜上的第二电极膜。 压电薄膜具有由多个结晶化的压电薄膜构成的叠层结构。 具有预定厚度的压电膜通过形成压电薄膜的成膜步骤和对压电薄膜进行热处理以结晶化的结晶热处理步骤的重复循环形成。 以这种方式，可以产生在膜厚度方向上显示均匀结晶度的压电膜。

公开(公告)号：US20090174292A1

公开(公告)日：2009-07-09

申请号：US12116646

申请日：2008-05-07

申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

IPC分类号： H01L41/04

CPC分类号： G01C19/5663 ,  G01C19/5783

摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.

摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。 振动元件安装在支撑基板的表面上。 振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。 振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。 振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。 当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。

公开(公告)号：US20080257044A1

公开(公告)日：2008-10-23

申请号：US10599833

申请日：2006-02-23

申请人： Shigeto Watanabe ,  Junichi Honda ,  Shin Sasaki ,  Kazuo Takahashi ,  Teruo Inaguma ,  Koji Suzuki ,  Manabu Aizawa

发明人： Shigeto Watanabe ,  Junichi Honda ,  Shin Sasaki ,  Kazuo Takahashi ,  Teruo Inaguma ,  Koji Suzuki ,  Manabu Aizawa

IPC分类号： G01C19/56

CPC分类号： G01C19/5663 ,  G01C19/5656

摘要： To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.

摘要翻译： 通过简单的结构实现尺寸缩小和高Q值提高特性。 根据本发明的振动陀螺传感器1包括其上安装有电路元件的支撑基板2和布置在其上的多个焊盘4的布线图案; 以及安装在支撑基板的表面2-1上的振动元件20。 振动元件20包括基部22，基部22具有安装表面22-2，该安装表面22-2设置有连接到焊盘的多个端子25; 以及从基部22的一侧以悬臂方式一体地延伸并具有与基部22的安装面齐平的面向基板的表面的振动部23，面向基板的表面设置有第一电极 堆叠在第一电极层上的压电层28和堆叠在压电层上的第二电极层29,30。 振动元件20通过将端子25与设置在它们之间的金属突起26接合到平台4而安装在支撑基板2上。

公开(公告)号：US07291511B2

公开(公告)日：2007-11-06

申请号：US11066014

申请日：2005-02-25

申请人： Teruo Inaguma ,  Junichi Honda ,  Takashi Tamura ,  Kazuo Takahashi

发明人： Teruo Inaguma ,  Junichi Honda ,  Takashi Tamura ,  Kazuo Takahashi

IPC分类号： H01L21/00 ,  H01L41/00

CPC分类号： G01C19/5656

摘要： A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

摘要翻译： 施加用于允许振动器振动的电压的驱动电极，并且形成作为上电极的沿振动器的纵向方向彼此平行延伸的第一和第二检测电极，使得驱动电极插入在第一 和第二检测电极，并且不与检测电极接触。 当在下电极和驱动电极之间施加电压以允许振动器以垂直共振频率振动时，在第一和第二检测电极中检测到的检测信号之间存在差异的情况下，将激光照射到 所述振动器的期望部分基于在所述第一和第二检测电极中检测到的检测信号进行研磨操作，从而调节所述振动器的形状。

公开(公告)号：US20060197414A1

公开(公告)日：2006-09-07

申请号：US11368144

申请日：2006-03-03

申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

IPC分类号： H01L41/113

CPC分类号： G01C19/5663 ,  G01C19/5783

摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.

摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有多个平台的布线图案，以及安装在支撑基板的表面上的振动元件，其中至少两个振动元件安装在支撑基板上，用于检测不同的振动 轴向。

公开(公告)号：US20050241395A1

公开(公告)日：2005-11-03

申请号：US11088480

申请日：2005-03-24

申请人： Kazuo Takahashi ,  Takashi Tamura ,  Junichi Honda ,  Teruo Inaguma

发明人： Kazuo Takahashi ,  Takashi Tamura ,  Junichi Honda ,  Teruo Inaguma

IPC分类号： G01C19/56 ,  G01C19/5656 ,  G01C19/5663 ,  H01L41/08 ,  H01L41/18 ,  H01L41/22 ,  H01L41/29 ,  H01L41/311

CPC分类号： G01C19/5642

摘要： Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5

摘要翻译： 公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。 通过薄膜形成工艺在单晶硅衬底上形成的具有下电极，压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a， 用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b，6c，而不接触 与驱动电极6a连接。 驱动电极6a的宽度W 0，第一检测电极6b的宽度W 1，第二检测电极6c的宽度W 2，W = W 0 + W 1 + W 2，条件 为0.5 <（W 0 / W）<1。

公开(公告)号：US07401516B2

公开(公告)日：2008-07-22

申请号：US11734459

申请日：2007-04-12

申请人： Teruo Inaguma ,  Junichi Honda ,  Takashi Tamura ,  Kazuo Takahashi

发明人： Teruo Inaguma ,  Junichi Honda ,  Takashi Tamura ,  Kazuo Takahashi

IPC分类号： G01P3/02 ,  G01P9/00 ,  H01L41/08

CPC分类号： G01C19/5656

摘要： A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

摘要翻译： 施加用于允许振动器振动的电压的驱动电极，并且形成作为上电极的沿振动器的纵向方向彼此平行延伸的第一和第二检测电极，使得驱动电极插入在第一 和第二检测电极，并且不与检测电极接触。 当在下电极和驱动电极之间施加电压以允许振动器以垂直共振频率振动时，在第一和第二检测电极中检测到的检测信号之间存在差异的情况下，将激光照射到 所述振动器的期望部分基于在所述第一和第二检测电极中检测到的检测信号进行研磨操作，从而调节所述振动器的形状。

公开(公告)号：US07723905B2

公开(公告)日：2010-05-25

申请号：US12116646

申请日：2008-05-07

申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

IPC分类号： H01L41/08

CPC分类号： G01C19/5663 ,  G01C19/5783

摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having lands is formed. A vibrating element is mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a number of terminals connectable to the lands is formed. A vibrator part integrally projects from a side of the base part and has a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer which are laminated on the substrate-facing surface. The vibrator part vibrates when an AC signal is applied between the first and second electrode layers. The central electric field strength of the AC signal is set at a position shifting to the positive direction from the center of a hysteresis loop of the piezoelectric layer.

摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有具有平台的布线图案。 振动元件安装在支撑基板的表面上。 振动元件包括具有安装表面的基座部分，其上形成有可连接到焊盘的多个端子。 振动器部分从基部的一侧整体地突出并且具有与基部的安装表面共面的面向对象的表面。 振动器部分具有层压在面向基板的表面上的第一电极层，压电层和第二电极层。 当在第一和第二电极层之间施加AC信号时，振动器部分振动。 AC信号的中心电场强度设定在从压电层的磁滞回线的中心向正方向移动的位置。

公开(公告)号：US07723901B2

公开(公告)日：2010-05-25

申请号：US11363395

申请日：2006-02-27

申请人： Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Kazuo Takahashi ,  Eiji Nakashio

发明人： Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Kazuo Takahashi ,  Eiji Nakashio

IPC分类号： H01L41/08

CPC分类号： B81B3/0067 ,  B81B2201/0285 ,  B81B2203/0118 ,  G01C19/5663 ,  G01P15/0802

摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.

摘要翻译： 振动陀螺传感器包括：支撑基板，其上形成有多个焊盘的布线图案;以及安装在支撑基板的表面上的振动元件。 所述振动元件包括基部，所述基部具有安装面，多个端子和从所述基部的一个侧面以悬臂方式一体地突出的振动器部，并且具有与所述基板的安装面共面的面向基板的表面 的基础部分。 振子部具有依次形成在面向基板的表面上的第一电极层，压电层和第二电极层。 此外，在振动部的基端形成有加强部，使得振动部的截面积朝向基部逐渐增大。