发明申请
US20110159433A1 PHOTOSENSITIVE COMPOSITION, PATTERN-FORMING METHOD USING THE COMPOSITION, AND RESIN USED IN THE COMPOSITION
有权
感光性组合物,使用该组合物的图案形成方法和在组合物中使用的树脂
- 专利标题: PHOTOSENSITIVE COMPOSITION, PATTERN-FORMING METHOD USING THE COMPOSITION, AND RESIN USED IN THE COMPOSITION
- 专利标题(中): 感光性组合物,使用该组合物的图案形成方法和在组合物中使用的树脂
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申请号: US13062285申请日: 2009-08-26
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公开(公告)号: US20110159433A1公开(公告)日: 2011-06-30
- 发明人: Hidenori Takahashi , Tomotaka Tsuchimura , Toru Tsuchihashi , Katsuhiro Yamashita , Naoyuki Nishikawa
- 申请人: Hidenori Takahashi , Tomotaka Tsuchimura , Toru Tsuchihashi , Katsuhiro Yamashita , Naoyuki Nishikawa
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM CORPORATION
- 当前专利权人: FUJIFILM CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-228994 20080905; JP2009-145677 20090618
- 国际申请: PCT/JP2009/065286 WO 20090826
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; C07C309/00 ; C08F228/02 ; G03F7/004 ; C08F214/18 ; C08F222/40
摘要:
Provided are a radiation-sensitive composition including a compound (P) having a partial structure (A) having an ionic structural site and capable of decomposing upon irradiation with an actinic ray or radiation to generate an acid and a partial structure (B) having at least one phenolic hydroxyl group, a part or all of hydrogen atoms of the hydroxyl group or groups each being protected by a group capable of leaving by the action of an acid, wherein the ionic structural site of the partial structure (A) contained in the compound (P) is a structure capable of generating an acid anion in the compound (P) upon irradiation with an actinic ray or radiation; a pattern-forming method using the same; and a resin which is used in the composition.
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