发明申请
- 专利标题: DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- 专利标题(中): 开发设备,开发方法和存储介质
-
申请号: US13024430申请日: 2011-02-10
-
公开(公告)号: US20110200952A1公开(公告)日: 2011-08-18
- 发明人: Yasushi Takiguchi , Taro Yamamoto , Hiroshi Arima , Kousuke Yoshihara , Yuichi Yoshida
- 申请人: Yasushi Takiguchi , Taro Yamamoto , Hiroshi Arima , Kousuke Yoshihara , Yuichi Yoshida
- 申请人地址: JP Tokyo
- 专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-030532 20100215
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; G03F7/30
摘要:
There is provided a developing apparatus and a developing method capable of rapidly forming a liquid film of a developing solution on an entire surface of a substrate while reducing a usage amount of the developing solution. The developing apparatus includes an airtightly sealed processing vessel that forms a processing atmosphere therein; a temperature control plate that is provided within the processing vessel and mounts the substrate thereon; an atmosphere gas supply unit that supplies an atmosphere gas including mist and vapor of a developing solution onto a surface of the substrate within the processing vessel; and a first temperature control unit that controls the temperature control plate to a temperature allowing the atmosphere gas to be condensed on the substrate. Here, an inner wall of the processing vessel is maintained at a temperature at which the atmosphere gas is hardly condensed on the inner wall.
公开/授权文献
- US08337104B2 Developing apparatus, developing method and storage medium 公开/授权日:2012-12-25
信息查询