Invention Application
US20110233729A1 CDTE SEMICONDUCTOR SUBSTRATE FOR EPITAXIAL GROWTH AND SUBSTRATE CONTAINER
有权
用于外延生长和底物容器的CDTE半导体衬底
- Patent Title: CDTE SEMICONDUCTOR SUBSTRATE FOR EPITAXIAL GROWTH AND SUBSTRATE CONTAINER
- Patent Title (中): 用于外延生长和底物容器的CDTE半导体衬底
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Application No.: US13131614Application Date: 2010-09-30
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Publication No.: US20110233729A1Publication Date: 2011-09-29
- Inventor: Kenji Suzuki , Hideyuki Taniguchi , Hideki Kurta , Ryuichi Hirano
- Applicant: Kenji Suzuki , Hideyuki Taniguchi , Hideki Kurta , Ryuichi Hirano
- Priority: JP2009-227697 20090930
- International Application: PCT/JP2010/067142 WO 20100930
- Main IPC: H01L29/22
- IPC: H01L29/22 ; B65D85/00

Abstract:
Provided is a CdTe-based semiconductor substrate for epitaxial growth, which is capable of growing good-quality epitaxial crystals without urging a substrate user to implement etching treatment before the epitaxial growth.A CdTe-based semiconductor substrate, in which tracks of linear polishing damage with a depth of 1 nm or more are not observed within a viewing range of 10 μm×10 μm when a surface of the substrate is observed by an atomic force microscope, and orange peel defects are not observed when the surface of the substrate is visually observed under a fluorescent lamp, can grow the good-quality epitaxial crystals.
Public/Granted literature
- US08513775B2 CdTe semiconductor substrate for epitaxial growth and substrate container Public/Granted day:2013-08-20
Information query
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