发明申请
US20110244131A1 METHOD AND APPARATUS FOR TEMPLATE SURFACE TREATMENT, AND PATTERN FORMING METHOD
审中-公开
用于模板表面处理的方法和装置，以及图案形成方法
- 专利标题： METHOD AND APPARATUS FOR TEMPLATE SURFACE TREATMENT, AND PATTERN FORMING METHOD
- 专利标题（中）： 用于模板表面处理的方法和装置，以及图案形成方法
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申请号： US13043911申请日： 2011-03-09
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公开(公告)号： US20110244131A1公开(公告)日： 2011-10-06
- 发明人: Yoshihisa KAWAMURA , Katsutoshi Kobayashi , Shinichi Ito , Hidekazu Hayashi , Hiroshi Tomita
- 申请人： Yoshihisa KAWAMURA , Katsutoshi Kobayashi , Shinichi Ito , Hidekazu Hayashi , Hiroshi Tomita
- 优先权： JP2010-81019 20100331; JP2010-280514 20101216
- 主分类号： B05D5/02
- IPC分类号： B05D5/02 ; B05D3/10
摘要：
According to an embodiment, a template surface treatment method includes hydroxylating the surface of a template having an uneven pattern surface or absorbing water onto the surface to distribute OH radicals on the surface, and coupling a coupling agent onto the template surface on which the OH radicals are distributed. These processes are performed in an environment in which amines are controlled to be in a predetermined concentration or less.
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