公开(公告)号：US08119313B2

公开(公告)日：2012-02-21

申请号：US12696142

申请日：2010-01-29

申请人： Katsutoshi Kobayashi ,  Daizo Muto ,  Koutarou Sho ,  Tsukasa Azuma

发明人： Katsutoshi Kobayashi ,  Daizo Muto ,  Koutarou Sho ,  Tsukasa Azuma

IPC分类号： G03C5/00

CPC分类号： G03F7/162 ,  G03F7/70341

摘要： A method for manufacturing a semiconductor device, includes: supplying a liquid resist containing a water-repellent additive to a surface of a rotating semiconductor wafer fixed to a rotary support to form a resist film to a design thickness on the surface of the semiconductor wafer; spin drying the resist film; bringing a liquid into contact with the resist film and exposing the resist film through the liquid after the spin drying; developing the resist film to form a resist pattern; and performing processing on the semiconductor wafer.A condition for adjusting contact angle between the resist film surface and the liquid is controlled so that the contact angle assumes a desired value, the condition including at least one selected from the group consisting of spin drying time for the resist film, resist temperature during the supplying, pressure of an atmosphere above the semiconductor wafer surface, and humidity of the atmosphere above the semiconductor wafer surface.

摘要翻译： 一种半导体装置的制造方法，其特征在于，包括：向固定于旋转支撑体的旋转半导体晶片的表面供给含有防水添加剂的液体抗蚀剂，以形成半导体晶片表面的设计厚度的抗蚀剂膜; 旋转干燥抗蚀膜; 使液体与抗蚀剂膜接触，并且在旋转干燥后使抗蚀膜暴露于液体中; 显影抗蚀剂膜以形成抗蚀剂图案; 并对半导体晶片进行处理。 控制用于调整抗蚀剂膜表面和液体之间的接触角的条件，使得接触角呈现期望值，该条件包括选自抗蚀剂膜的旋转干燥时间，抗蚀剂膜的抗蚀剂温度 提供半导体晶片表面之上的气氛的压力，以及半导体晶片表面之上的气氛的湿度。

公开(公告)号：US07823171B2

公开(公告)日：2010-10-26

申请号：US11918963

申请日：2006-04-19

申请人： Yoshiaki Yokochi ,  Hiroyuki Shishido ,  Katsutoshi Kobayashi

发明人： Yoshiaki Yokochi ,  Hiroyuki Shishido ,  Katsutoshi Kobayashi

IPC分类号： G11B17/04

CPC分类号： G11B17/0515 ,  G11B17/0404

摘要： A loading mechanism (11) has first and second arm members (30, 30) rotated about first and second supporting points (31, 31), a cam mechanism (60) for rotating, by driving force from a drive source (71), at least either of the first and second arm members (30, 30) to hold and feed a disc (12), and a third arm member (80) independently rotated about a third supporting point (81), applying urging force to the disc (12) by an urging means (86) to hold the outer circumferential edge of the disc (12). In the holding and feeding of the disc, the center part of the disc (12) is present inside a figure obtained by connecting adjacent points out of three or more points of contact between the disc (12) and the first to third arm members (30, 30, 80).

摘要翻译： 装载机构（11）具有围绕第一和第二支撑点（31,31）旋转的第一和第二臂构件（30,30），用于通过来自驱动源（71）的驱动力旋转的凸轮机构（60） 所述第一和第二臂构件（30,30）中的至少一个用于保持和供给盘（12），以及第三臂构件（80），其独立地绕第三支撑点（81）旋转，向盘施加推动力 （12）通过推动装置（86）保持盘（12）的外圆周边缘。 在盘的保持和进给中，盘（12）的中心部分存在于通过将盘（12）和第一至第三臂构件（3）之间的三个或更多个接触点相连接的相邻点 30，30，80）。

公开(公告)号：US20060022928A1

公开(公告)日：2006-02-02

申请号：US11190814

申请日：2005-07-28

申请人： Jinoh Kim ,  Katsutoshi Kobayashi

发明人： Jinoh Kim ,  Katsutoshi Kobayashi

IPC分类号： G09G3/36

CPC分类号： G09G3/3655 ,  G09G3/3607 ,  G09G2300/0443 ,  G09G2300/0876 ,  G09G2320/028 ,  G09G2330/024

摘要： A pixel charge-discharge circuit charges and discharges a series circuit of a capacitor by alternately connecting two types of auxiliary capacitance wires to a high voltage source and a low voltage source by using four types of switches. The high voltage source and the low voltage source are positive voltage sources, and a potential of the high voltage source is greater than that of the low voltage source. The low voltage source serving as a sink-current-flowing voltage source includes a stored energy adjustment section. The stored energy adjustment section discharges electrostatic energy from the high voltage source by turning ON and OFF two types of switches and causes the electrostatic energy to be balanced by energy supplied from the series circuit. In this way, a capacitive load charge-discharge device can be achieved which uses homopolar voltage sources as both a high voltage source and a low voltage source and is capable of stabilizing a constant voltage function of each of the voltage sources, while generating less heat, when a capacitive load is charged and discharged by alternately reversing the direction of a current.

公开(公告)号：US20150260042A1

公开(公告)日：2015-09-17

申请号：US14413725

申请日：2012-07-11

申请人： Noriyo Nishijima ,  Akira Endo ,  Katsutoshi Kobayashi ,  Kazuyuki Yamaguchi

发明人： Noriyo Nishijima ,  Akira Endo ,  Katsutoshi Kobayashi ,  Kazuyuki Yamaguchi

IPC分类号： F01D1/02 ,  F01D5/02 ,  F01D11/08 ,  F01D9/04 ,  F01D25/24 ,  F01D11/02 ,  F01D1/04 ,  F01D5/12

CPC分类号： F01D11/02 ,  F01D5/225 ,  F01D11/08 ,  F05D2220/30 ,  F05D2220/31 ,  F05D2240/12 ,  F05D2240/24

摘要： The invention provides an axial flow machine that effectively reduces the unstable hydrodynamic force induced by leakage flow and thereby prevents unstable vibrations.A steam turbine comprises: a ring-shaped cover 6 connected to the outer circumferential side of a rotor blade row 4; and a ring-shaped concave section 12 provided on an inner circumferential surface 8 of a casing 1 for housing the cover 6. A narrow passage 15 is formed between an outer circumferential surface 13 of the cover 6 and a bottom surface 14 of the concave section 12. A narrow inflow passage 18 is formed between an upstream lateral surface 16 of the cover 6 and an upstream lateral surface 17 of the concave section 12. A narrow outflow passage 21 is formed between a downstream lateral surface 19 of the cover 6 and a downstream lateral surface 20 of the concave section 12. Between the narrow inflow passage 18 and the narrow passage 15 lies an expanded inflow passage 22. The expanded inflow passage 22 has a substantially uniform structure in a circumferential direction and is formed such that it is located on the more outer circumferential side than the bottom surface 20 of the concave section 12 and such that it is located upstream side in terms of the rotor's axial direction with respect to the upstream lateral surface 17 of the concave section 12.

摘要翻译： 本发明提供了一种有效地减少由泄漏流引起的不稳定流体动力的轴流机，从而防止不稳定的振动。 蒸汽轮机包括：连接到转子叶片排4的外圆周侧的环形盖6; 以及设置在用于容纳盖6的壳体1的内周面8上的环状的凹部12.在盖6的外周面13和凹部的底面14之间形成狭窄的通路15 在盖6的上游侧表面16和凹部12的上游侧表面17之间形成狭窄的流入通道18.窄的流出通道21形成在盖6的下游侧表面19和 凹入部分12的下游侧面20之间。狭窄的流入通道18和窄通道15之间设有扩张的流入通道22.扩张的流入通道22在圆周方向上具有基本上均匀的结构，并且形成为使得其位于 在比凹部12的底面20更外侧的侧面上，并且相对于t为转子的轴向方向而位于上游侧 它是凹部12的上游侧表面17。

公开(公告)号：US08174474B2

公开(公告)日：2012-05-08

申请号：US12298716

申请日：2007-04-05

申请人： Yuichi Inoue ,  Katsutoshi Kobayashi ,  Tetsuya Kobayashi ,  Hidehiko Yamaguchi ,  Seiji Sutoh

发明人： Yuichi Inoue ,  Katsutoshi Kobayashi ,  Tetsuya Kobayashi ,  Hidehiko Yamaguchi ,  Seiji Sutoh

IPC分类号： G09G3/36 ,  G06F3/038

CPC分类号： G09G3/3696 ,  G02F1/133305 ,  G09G3/3614 ,  G09G3/3655 ,  G09G2320/0204 ,  G09G2320/0209 ,  G09G2320/0247 ,  G09G2320/046

摘要： A voltage having the positive polarity and a voltage having the negative polarity are alternately applied to a pixel between a counter electrode and a pixel electrode. A counter electrode voltage (Vcom) generating circuit or a source signal generating section is provided each of which controls effective voltages to be applied to the pixel for an identical tone so that an effective voltage having the positive polarity and an effective voltage having the negative polarity are asymmetrically applied to the pixel for all of the tones which can be displayed. The counter electrode voltage (Vcom) generating circuit or the source signal generating section shifts a counter electrode voltage Vcom-A or a source voltage by 0.3 V or more from a voltage causing the effective voltages to be symmetrically applied to the pixel.

摘要翻译： 具有正极性的电压和具有负极性的电压交替施加到对电极和像素电极之间的像素。 提供了对置电极电压（Vcom）产生电路或源极信号产生部分，每个控制对于相同色调的像素施加的有效电压，使得具有正极性的有效电压和具有负极性的有效电压 对于可以显示的所有音调，不对称地应用于像素。 相对电极电压（Vcom）产生电路或源极信号产生部分使电极电压Vcom-A或源极电压从导致有效电压对称地施加到像素的电压移动0.3V或更大。

公开(公告)号：US08142985B2

公开(公告)日：2012-03-27

申请号：US12477719

申请日：2009-06-03

申请人： Katsutoshi Kobayashi

发明人： Katsutoshi Kobayashi

IPC分类号： G03F7/26

CPC分类号： G03F7/2028 ,  G03F7/70341

摘要： A method for manufacturing a semiconductor device including: forming a resist film 11 on a film to be processed 32; baking the resist film 11; performing immersion exposure on the resist film 11 after the baking; performing post exposure bake on the resist film 11 after performing the immersion exposure; developing the resist film 11 after performing the post exposure bake; and after the post exposure bake is performed on the resist film 11, removing an edge 15 of the resist film 11, the edge not being exposed.

摘要翻译： 一种制造半导体器件的方法，包括：在待处理膜32上形成抗蚀剂膜11; 烘烤抗蚀剂膜11; 在烘烤后对抗蚀剂膜11进行浸渍曝光; 在进行浸渍曝光之后对抗蚀膜11进行后曝光烘烤; 在进行后曝光烘烤之后显影抗蚀剂膜11; 在抗蚀剂膜11上进行后曝光烘烤之后，除去抗蚀剂膜11的边缘15，边缘不被曝光。

公开(公告)号：US20110316821A1

公开(公告)日：2011-12-29

申请号：US13166545

申请日：2011-06-22

申请人： Takamitsu SUZUKI ,  Katsutoshi KOBAYASHI

发明人： Takamitsu SUZUKI ,  Katsutoshi KOBAYASHI

IPC分类号： G09G3/36 ,  G06F3/038

CPC分类号： G09G3/3688 ,  G09G2310/027 ,  G09G2310/08 ,  G09G2330/025 ,  G09G2330/06

摘要： A driving circuit according to the present invention for driving a display apparatus based on display data and a control signal includes: a delay circuit for delaying the input control signal; and a data load section for loading the input display data to the display apparatus at a timing generated by the delayed control signal, where the delay circuit delays the control signal in such a manner that load timing at which the display data is loaded to the display apparatus varies according to fixed timing determined by a constant cycle.

摘要翻译： 根据本发明的用于基于显示数据和控制信号驱动显示装置的驱动电路包括：用于延迟输入控制信号的延迟电路; 以及数据加载部分，用于在延迟控制信号产生的定时将输入的显示数据加载到显示装置，其中延迟电路以显示数据加载到显示器的加载定时的方式延迟控制信号 装置根据由恒定周期确定的固定时间而变化。

公开(公告)号：US20090220896A1

公开(公告)日：2009-09-03

申请号：US12392905

申请日：2009-02-25

申请人： Katsutoshi Kobayashi ,  Kotaro Sho ,  Daisuke Kawamura

发明人： Katsutoshi Kobayashi ,  Kotaro Sho ,  Daisuke Kawamura

IPC分类号： G03F7/20

CPC分类号： G03F7/11 ,  G03F7/0757 ,  G03F7/095

摘要： A pattern forming method has forming a lower layer film on a film to be processed, forming a silicon-containing intermediate film containing a protecting group which is removed by an acid, on said lower layer film, forming a resist film on said silicon-containing intermediate film, exposing a predetermined region of said resist film to light, and developing said resist film with a developer.

摘要翻译： 图案形成方法在被处理膜上形成下层膜，在所述下层膜上形成含有被酸去除的保护基的含硅中间膜，在所述含硅物质上形成抗蚀剂膜 中间膜，将所述抗蚀剂膜的预定区域曝光，并用显影剂显影所述抗蚀剂膜。

公开(公告)号：US09251757B2

公开(公告)日：2016-02-02

申请号：US13166545

申请日：2011-06-22

申请人： Takamitsu Suzuki ,  Katsutoshi Kobayashi

发明人： Takamitsu Suzuki ,  Katsutoshi Kobayashi

IPC分类号： G09G3/36

CPC分类号： G09G3/3688 ,  G09G2310/027 ,  G09G2310/08 ,  G09G2330/025 ,  G09G2330/06

摘要： A driving circuit according to the present invention for driving a display apparatus based on display data and a control signal includes: a delay circuit for delaying the input control signal; and a data load section for loading the input display data to the display apparatus at a timing generated by the delayed control signal, where the delay circuit delays the control signal in such a manner that load timing at which the display data is loaded to the display apparatus varies according to fixed timing determined by a constant cycle.

摘要翻译： 根据本发明的用于基于显示数据和控制信号驱动显示装置的驱动电路包括：用于延迟输入控制信号的延迟电路; 以及数据加载部分，用于在延迟控制信号产生的定时将输入的显示数据加载到显示装置，其中延迟电路以显示数据加载到显示器的加载定时的方式延迟控制信号 装置根据由恒定周期确定的固定时间而变化。

公开(公告)号：US20140017192A1

公开(公告)日：2014-01-16

申请号：US14008181

申请日：2012-04-02

申请人： Hiroyuki Saito ,  Katsutoshi Kobayashi ,  Ryosuke Tanaka ,  Mitsunori Harada ,  Yasuki Kato

发明人： Hiroyuki Saito ,  Katsutoshi Kobayashi ,  Ryosuke Tanaka ,  Mitsunori Harada ,  Yasuki Kato

IPC分类号： A61K47/48 ,  A61K31/69

CPC分类号： A61K47/48207 ,  A61K31/69 ,  A61K47/60 ,  A61K47/645

摘要： A pharmaceutical composition includes a block copolymer having a hydrophilic segment, a hydrophobic segment, and a boronic acid compound bound to a side chain of the hydrophobic segment via a linker moiety that includes a heterocyclic structure. The heterocyclic structure contains a cyclic skeleton that includes a boron atom of the boronic acid compound, one or two atom(s) X bound to the boron atom and selected from an oxygen atom and a nitrogen atom, and one or two carbon atom(s) (respectively) bound to the atom(s) X. The block copolymer further includes at least one organic group bound to the carbon atom(s). The organic group(s) contain(s) an aromatic group or cyclic alkyl group that sterically protects a boronic acid ester bond and/or a boron amide bond resulting from bonding between the boron atom and the atom(s) X.

摘要翻译： 药物组合物包括具有亲水链段，疏水链段和通过包含杂环结构的连接体部分与疏水片段的侧链结合的硼酸化合物的嵌段共聚物。 杂环结构包含环状骨架，其包含硼酸化合物的硼原子，与硼原子结合并选自氧原子和氮原子的一个或两个原子X以及一个或两个碳原子 ）（分别）与X原子结合。嵌段共聚物还包括至少一个与碳原子键合的有机基团。 有机基团含有空间保护由硼原子和原子X之间的键合产生的硼酸酯键和/或硼酰胺键的芳族基团或环状烷基。