发明申请
- 专利标题: SEMICONDUCTOR EQUIPMENT AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 半导体设备及其制造方法
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申请号: US13173647申请日: 2011-06-30
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公开(公告)号: US20110254147A1公开(公告)日: 2011-10-20
- 发明人: Nobuyuki OTSUKA , Manabu Yanagihara , Shuichi Nagai , Daisuke Ueda
- 申请人: Nobuyuki OTSUKA , Manabu Yanagihara , Shuichi Nagai , Daisuke Ueda
- 优先权: JP2010-053874 20100310
- 主分类号: H01L23/44
- IPC分类号: H01L23/44 ; H01L21/54
摘要:
To provide a semiconductor equipment having high heat-transfer effect and breakdown voltage, and a method of manufacturing the same. The semiconductor equipment includes: a sealed container; a stem connected to the sealed container via a stem peripheral portion; and a semiconductor chip mounted on a top surface of the stem, inside the sealed container. The semiconductor chip is electrically connected to a lead provided to the stem, the stem peripheral portion, which is of a material that is different from the material of stem and the same as the material of the sealed container, is bonded along a periphery of the stem, and the sealed container is filled with a working fluid including at least one of ethanol, a perfluorocarbon, and a fluoroether.
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