发明申请
US20110260230A1 CELL WITH SURROUNDING WORD LINE STRUCTURES AND MANUFACTURING METHOD THEREOF 审中-公开
具有周边字线结构的单元及其制造方法

CELL WITH SURROUNDING WORD LINE STRUCTURES AND MANUFACTURING METHOD THEREOF
摘要:
A memory cell with surrounding word line structures includes an active area; a plurality of first trenches formed on the active area in a first direction, each first trench has a bit line on a sidewall therein; a plurality of second trenches formed on the active area in a second direction, each second trench has two word lines formed correspondingly on the sidewalls in the second trench; and a plurality of transistors formed on the active area. The word line pairs are arranged into a surrounding word line structure. The transistor is controlled by the bit line and the two word lines, thus improving the speed of the transistor.
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