发明申请
US20110315951A1 METHOD FOR FORMING A CATALYST SUITABLE FOR GROWTH OF CARBON NANOTUBES
有权
形成适用于碳纳米管生长的催化剂的方法
- 专利标题: METHOD FOR FORMING A CATALYST SUITABLE FOR GROWTH OF CARBON NANOTUBES
- 专利标题(中): 形成适用于碳纳米管生长的催化剂的方法
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申请号: US13096310申请日: 2011-04-28
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公开(公告)号: US20110315951A1公开(公告)日: 2011-12-29
- 发明人: Hari Pathangi Sriraman , Ann Witvrouw , Philippe M. Vereecken
- 申请人: Hari Pathangi Sriraman , Ann Witvrouw , Philippe M. Vereecken
- 申请人地址: BE Leuven BE Leuven
- 专利权人: Katholieke Universiteit Leven, K.U.LEUVEN R&D,IMEC
- 当前专利权人: Katholieke Universiteit Leven, K.U.LEUVEN R&D,IMEC
- 当前专利权人地址: BE Leuven BE Leuven
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/20 ; B05D5/12 ; C25D15/00 ; B82Y30/00 ; B82Y40/00
摘要:
The present disclosure is related to a method for forming a catalyst nanoparticle on a metal surface, the nanoparticle being suitable for growing a single nanostructure, in particular a carbon nanotube, the method comprising at least the steps of: providing a substrate, having a metal layer on at least a portion of the substrate surface, depositing a sacrificial layer at least on the metal layer, producing a small hole in the sacrificial layer, thereby exposing the metal layer, providing a single catalyst nanoparticle into the hole, removing the sacrificial layer. The disclosure is further related to growing a carbon nanotube from the catalyst nanoparticle.
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