- 专利标题: SYSTEM AND METHOD OF FABRICATING MEDIA
-
申请号: US12836823申请日: 2010-07-15
-
公开(公告)号: US20120012554A1公开(公告)日: 2012-01-19
- 发明人: Xiaoping Bian , Qing Dai , Dan S. Kercher , Mark F. Mercado , Qi-fan Xiao , Jane J. Zhang
- 申请人: Xiaoping Bian , Qing Dai , Dan S. Kercher , Mark F. Mercado , Qi-fan Xiao , Jane J. Zhang
- 申请人地址: NL Amsterdam
- 专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人地址: NL Amsterdam
- 主分类号: C23C14/34
- IPC分类号: C23C14/34
摘要:
A method of fabricating media comprises forming recording media on a substrate. An overcoat is deposited on the recording media opposite the substrate. The overcoat has a first surface finish. The overcoat is etched to remove material and provide the overcoat with a second surface finish that is smoother than the first surface finish. The depositing and etching may occur sequentially in an in-situ, dry vacuum process. The second surface finish may not be mechanically processed after etching to further planarize the overcoat.
信息查询
IPC分类: