发明申请
- 专利标题: LOW RESISTANCE AND RELIABLE COPPER INTERCONNECTS BY VARIABLE DOPING
- 专利标题(中): 低电阻和可靠的铜互连通过可变掺杂
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申请号: US13249823申请日: 2011-09-30
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公开(公告)号: US20120021602A1公开(公告)日: 2012-01-26
- 发明人: Ting-Chu Ko , Ming-Hsing Tsai , Chien-Hsueh Shih
- 申请人: Ting-Chu Ko , Ming-Hsing Tsai , Chien-Hsueh Shih
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L21/768
- IPC分类号: H01L21/768
摘要:
A method and system is provided for efficiently varying the composition of the metal interconnects for a semiconductor device. A metal interconnect according to the present disclosure has an intermediate layer on a dielectric material, the intermediate layer having a relatively higher concentration of an impurity metal along with a primary metal, the impurity metal having a lower reduction potential than the primary metal. The metal interconnect has a main layer of the metal alloy interconnect on top of the intermediate layer and surrounded by the intermediate layer, the main layer having a relatively higher concentration of the primary metal than the intermediate layer, wherein the intermediate and main layers of the metal alloy interconnect each maintains a material uniformity.
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