发明申请
- 专利标题： PARTICLE DISTRIBUTION ANALYSIS METHOD FOR COMPUTER READABLE STORAGE MEDIUM FOR STORING PROGRAM FOR EXECUTING THE METHOD
- 专利标题（中）： 用于存储程序的计算机可读存储介质的粒子分布分析方法
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申请号： US13175219申请日： 2011-07-01
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公开(公告)号： US20120029863A1公开(公告)日： 2012-02-02
- 发明人: Kunio Miyauchi , Hiroyuki Nakayama
- 申请人： Kunio Miyauchi , Hiroyuki Nakayama
- 申请人地址： JP Tokyo
- 专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Tokyo
- 优先权： JP2010-152463 20100702
- 主分类号： G06F17/18
- IPC分类号： G06F17/18 ; G06F15/00
摘要：
There is provided a support method for a particle distribution analysis for a substrate. In the support method, histogram data of inter-particle distances are created for all particles on a target substrate subjected to the particle distribution analysis from particle coordinate data of the target substrate. Further, histogram data of inter-particle distances are created for multiple virtual substrates each having the same number of randomly distributed particles as the particles on the target substrate. Based on a difference between the histogram data of the target substrate and the histogram data of each of the virtual substrates, determination data are created by quantifying a distance between the histogram data of the target substrate and the histogram data of the multiple virtual substrates, and the determination data are displayed on a display unit.
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