发明申请
US20120037989A1 LDMOS HAVING SINGLE-STRIP SOURCE CONTACT AND METHOD FOR MANUFACTURING SAME
审中-公开
具有单条线源的LDMOS接触器及其制造方法
- 专利标题: LDMOS HAVING SINGLE-STRIP SOURCE CONTACT AND METHOD FOR MANUFACTURING SAME
- 专利标题(中): 具有单条线源的LDMOS接触器及其制造方法
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申请号: US12857288申请日: 2010-08-16
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公开(公告)号: US20120037989A1公开(公告)日: 2012-02-16
- 发明人: Hsueh-I Huang , Shuo-Lun Tu , Ming-Tung Lee , Yin-Fu Huang , Shih-Chin Lien , Shyi-Yuan WU
- 申请人: Hsueh-I Huang , Shuo-Lun Tu , Ming-Tung Lee , Yin-Fu Huang , Shih-Chin Lien , Shyi-Yuan WU
- 申请人地址: TW Hsinchu
- 专利权人: MACRONIX INTERNATIONAL CO., LTD.
- 当前专利权人: MACRONIX INTERNATIONAL CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/336
摘要:
LDMOS devices having a single-strip contact pad in the source region, and related methods of manufacturing are disclosed. The LDMOS may comprise a first well lightly doped with a first dopant and formed into a portion of a substrate, the first well having a drain region at its surface heavily doped with the first dopant, and a second well lightly doped with a second dopant formed in another portion of the substrate, the second well having a source region at its surface comprising first portions heavily doped with the first dopant directly adjacent second portions heavily doped with the second dopant. Also, the LDMOS device may comprise a field oxide at the upper surface of the substrate between the source and drain regions, and contacting the first well but separated from the second well, and a gate formed partially over the field oxide and partially over the source region. The LDMOS may also comprise contact pads in contact with the gate, and source and drain regions, wherein the contact pad in contact with the source regions comprises a single-strip of conductive material extending across the source region.
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