Invention Application
US20120040278A1 INTENSITY SELECTIVE EXPOSURE PHOTOMASK 有权
强度选择性曝光光电

INTENSITY SELECTIVE EXPOSURE PHOTOMASK
Abstract:
An intensity selective exposure photomask, also describes as a gradated photomask, is provided. The photomask includes a first region including a first array of sub-resolution features. The first region blocks a first percentage of the incident radiation. The photomask also includes a second region including a second array of sub-resolution features. The second region blocks a second percentage of the incident radiation different that the first percentage.
Public/Granted literature
Information query
Patent Agency Ranking
0/0