Invention Application
- Patent Title: EUV COLLECTOR
- Patent Title (中): EUV收藏家
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Application No.: US13214470Application Date: 2011-08-22
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Publication No.: US20120050703A1Publication Date: 2012-03-01
- Inventor: Michael Layh , Udo Dinger
- Applicant: Michael Layh , Udo Dinger
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS SMT GMBH
- Current Assignee: CARL ZEISS SMT GMBH
- Current Assignee Address: DE Oberkochen
- Priority: DE102010039965.5 20100831
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B7/192 ; G03B27/70 ; G21K5/00

Abstract:
An EUV collector for collecting and transmitting radiation from an EUV radiation source includes at least one collector mirror for reflecting an emission of the EUV radiation source, which is rotationally symmetric with respect to a central axis. The EUV collector also includes a cooling device for cooling the at least one collector mirror. The cooling device has at least one cooling element, which has a course with respect to the collector mirror, in each case, such that the projection of the course into a plane perpendicular to the central axis has a main direction, which encloses an angle of at most 20° with respect to a predetermined preferred direction. The collector transmits improved quality radiation to illuminate an object field.
Public/Granted literature
- US09007559B2 EUV collector with cooling device Public/Granted day:2015-04-14
Information query
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