Invention Application
- Patent Title: CLEANING LIQUID AND CLEANING METHOD
- Patent Title (中): 清洁液体和清洁方法
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Application No.: US13321450Application Date: 2009-05-21
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Publication No.: US20120065116A1Publication Date: 2012-03-15
- Inventor: Masayuki Miyashita , Takanobu Kujime , Keiichi Nii , Masashi Yamamoto
- Applicant: Masayuki Miyashita , Takanobu Kujime , Keiichi Nii , Masashi Yamamoto
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: STELLA CHEMIFA CORPORATION
- Current Assignee: STELLA CHEMIFA CORPORATION
- Current Assignee Address: JP Osaka-shi, Osaka
- International Application: PCT/JP2009/059371 WO 20090521
- Main IPC: C11D7/08
- IPC: C11D7/08

Abstract:
Disclosed is a cleaning liquid which is capable of cleaning an object to be cleaned, to the surface of which cerium oxide adheres, by dissolving and removing cerium oxide in the form of cerium ions. A cleaning method using the cleaning liquid is also disclosed. The cleaning liquid for removing cerium oxide is characterized by containing hydrogen fluoride, at least one acid selected from the group consisting of hydrochloric acid, nitric acid, sulfuric acid, acetic acid, phosphoric acid, iodic acid and hydrobromic acid, and water. The cleaning liquid is also characterized by dissolving and removing cerium oxide in the form of cerium ions.
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