发明申请
- 专利标题: Optical Measuring Apparatuses
- 专利标题(中): 光学测量仪器
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申请号: US13281656申请日: 2011-10-26
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公开(公告)号: US20120105859A1公开(公告)日: 2012-05-03
- 发明人: Young HEO , Chang Hoon CHOI , Byung Seon CHUN , Kwang Soo KIM , Tae Joong KIM
- 申请人: Young HEO , Chang Hoon CHOI , Byung Seon CHUN , Kwang Soo KIM , Tae Joong KIM
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2010-0105450 20101027
- 主分类号: G01J3/45
- IPC分类号: G01J3/45 ; G01B9/02
摘要:
An optical measuring apparatus may include a light source, linear polarizer, polarized beam splitter, quarter wave plate, objective lens, and/or light receiver. The polarized beam splitter may be configured to transmit linearly polarized light from the linear polarizer to any one of a first and second optical path. The quarter wave plate may be configured to circularly polarize light transmitted through the first optical path from the polarized beam splitter and transmit the circularly polarized light to an object to be measured, and the quarter wave plate may be configured to linearly polarize the circularly polarized light reflected from the object to be measured and transmit the linearly polarized reflected light to the second optical path of the polarized beam splitter. The objective lens may be configured to generate light having different wavelengths by generating chromatic aberration in the circularly polarized light from the quarter wave plate.
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