公开(公告)号：US20120105859A1

公开(公告)日：2012-05-03

申请号：US13281656

申请日：2011-10-26

申请人： Young HEO ,  Chang Hoon CHOI ,  Byung Seon CHUN ,  Kwang Soo KIM ,  Tae Joong KIM

发明人： Young HEO ,  Chang Hoon CHOI ,  Byung Seon CHUN ,  Kwang Soo KIM ,  Tae Joong KIM

IPC分类号： G01J3/45 ,  G01B9/02

CPC分类号： G02B21/0064 ,  G01B11/026 ,  G01B11/06 ,  G01B11/24

摘要： An optical measuring apparatus may include a light source, linear polarizer, polarized beam splitter, quarter wave plate, objective lens, and/or light receiver. The polarized beam splitter may be configured to transmit linearly polarized light from the linear polarizer to any one of a first and second optical path. The quarter wave plate may be configured to circularly polarize light transmitted through the first optical path from the polarized beam splitter and transmit the circularly polarized light to an object to be measured, and the quarter wave plate may be configured to linearly polarize the circularly polarized light reflected from the object to be measured and transmit the linearly polarized reflected light to the second optical path of the polarized beam splitter. The objective lens may be configured to generate light having different wavelengths by generating chromatic aberration in the circularly polarized light from the quarter wave plate.

摘要翻译： 光学测量装置可以包括光源，线性偏振器，偏振分束器，四分之一波片，物镜和/或光接收器。 偏振分束器可以被配置为将来自线性偏振器的线偏振光透射到第一和第二光路中的任一个。 四分之一波片可以被配置为使从偏振分束器透射通过第一光路的光圆偏振，并将圆偏振光透射到被测量物体，并且四分之一波片可以被配置为使圆偏振光线性偏振 从被测量物体反射并将线性偏振反射光传输到偏振分束器的第二光路。 物镜可以被配置为通过在来自四分之一波片的圆偏振光中产生色差来产生具有不同波长的光。