发明申请
- 专利标题: THERMALLY CONTROLLED REFRACTORY METAL RESISTOR
- 专利标题(中): 热控制的金属电阻器
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申请号: US12962722申请日: 2010-12-08
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公开(公告)号: US20120146186A1公开(公告)日: 2012-06-14
- 发明人: Joseph M. Lukaitis , Deborah M. Massey , Timothy D. Sullivan , Ping-Chuan Wang , Kimball M. Watson
- 申请人: Joseph M. Lukaitis , Deborah M. Massey , Timothy D. Sullivan , Ping-Chuan Wang , Kimball M. Watson
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L21/02
摘要:
A structure and method of fabricating the structure includes a semiconductor substrate having a top surface defining a horizontal direction and a plurality of interconnect levels stacked from a lowermost level proximate the top surface of the semiconductor substrate to an uppermost level furthest from the top surface. Each of the interconnect levels include vertical metal conductors physically connected to one another in a vertical direction perpendicular to the horizontal direction. The vertical conductors in the lowermost level being physically connected to the top surface of the substrate, and the vertical conductors forming a heat sink connected to the semiconductor substrate. A resistor is included in a layer immediately above the uppermost level. The vertical conductors being aligned under a downward vertical resistor footprint of the resistor, and each interconnect level further include horizontal metal conductors positioned in the horizontal direction and being connected to the vertical conductors.
公开/授权文献
- US08592947B2 Thermally controlled refractory metal resistor 公开/授权日:2013-11-26
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