发明申请
- 专利标题: OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITHOGRAPHY
- 专利标题(中): 投影曝光装置的光学布置
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申请号: US13405882申请日: 2012-02-27
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公开(公告)号: US20120188523A1公开(公告)日: 2012-07-26
- 发明人: Viktor Kulitsky , Bernhard Gellrich , Stefan Xalter , Yim-Bun Patrick Kwan , Peter Deufel , Andreas Wurmbrand
- 申请人: Viktor Kulitsky , Bernhard Gellrich , Stefan Xalter , Yim-Bun Patrick Kwan , Peter Deufel , Andreas Wurmbrand
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT GMBH
- 当前专利权人: CARL ZEISS SMT GMBH
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102009045223.0 20090930
- 主分类号: G03B27/70
- IPC分类号: G03B27/70 ; G02B7/182
摘要:
An optical arrangement includes a multiplicity of optical elements and a carrier structure which carries the optical elements. The carrier structure is composed of at least two releasably interconnected modules. Each module is composed of at least one carrier structure subelement. A subhousing is produced by a multiplicity of carrier structure subelements and/or modules. The subhousing has a geometry that varies, at least in regions, in correspondence to a usable beam path in the projection exposure apparatus, the usable beam path being defined as an envelope of all light bundles which can propagate from all field points in a field plane to an image plane of the projection exposure apparatus. A projection exposure apparatus for EUV lithography includes such an optical arrangement.
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