发明申请
- 专利标题: METHODS FOR FORMING THREE-DIMENSIONAL MEMORY DEVICES, AND RELATED STRUCTURES
- 专利标题(中): 形成三维存储器件的方法及相关结构
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申请号: US13450960申请日: 2012-04-19
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公开(公告)号: US20120199987A1公开(公告)日: 2012-08-09
- 发明人: Nishant Sinha , Krishna K. Parat
- 申请人: Nishant Sinha , Krishna K. Parat
- 申请人地址: US ID Boise
- 专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L23/488
- IPC分类号: H01L23/488 ; H01L21/50
摘要:
Methods of forming semiconductor devices that include one or more arrays of memory devices in a three-dimensional arrangement, such as those that include forming a conductive contact in a dielectric material overlying a memory array, wherein a wafer bonding and cleaving process may be utilized to provide a foundation material for forming another memory array having an active region in electrical contact with the conductive contact. Additionally, the conductive contact may be formed in a donor wafer, which in turn may be bonded to a dielectric material overlying a memory array using another wafer bonding process. Novel semiconductor devices and structures including the same may be formed using such methods, for example.
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