发明申请
US20120225529A1 SEALING STRUCTURE FOR HIGH-K METAL GATE AND METHOD OF MAKING 有权
高K金属门的密封结构及其制备方法

SEALING STRUCTURE FOR HIGH-K METAL GATE AND METHOD OF MAKING
摘要:
The present disclosure provides a semiconductor device that includes a semiconductor substrate and a transistor formed in the substrate. The transistor includes a gate stack having a high-k dielectric and metal gate, a sealing layer formed on sidewalls of the gate stack, the sealing layer having an inner edge and an outer edge, the inner edge interfacing with the sidewall of the gate stack, a spacer formed on the outer edge of the sealing layer, and a source/drain region formed on each side of the gate stack, the source/drain region including a lightly doped source/drain (LDD) region that is aligned with the outer edge of the sealing layer.
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