Invention Application
- Patent Title: DETERMINATION METHOD, CONTROL METHOD, DETERMINATION APPARATUS, PATTERN FORMING SYSTEM AND PROGRAM
- Patent Title (中): 确定方法,控制方法,确定装置,图案形成系统和程序
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Application No.: US13430905Application Date: 2012-03-27
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Publication No.: US20120249986A1Publication Date: 2012-10-04
- Inventor: Keisuke Tanaka , Kazuo Sawai , Hiroshi Nagahata
- Applicant: Keisuke Tanaka , Kazuo Sawai , Hiroshi Nagahata
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Priority: JP2011-070947 20110328
- Main IPC: G03B27/52
- IPC: G03B27/52

Abstract:
A determination method, a control method, a determination apparatus, a pattern forming system, and a storage medium can determine a replacement time of a focus ring accurately and quickly. The determination method is capable of determining the replacement time of a focus ring that surrounds a substrate to increase uniformity of a pattern in a surface of the substrate when the pattern is formed by etching a film on the substrate. The determination method includes measuring a shape or a critical dimension of the pattern; and determining the replacement time of the focus ring based on the measured shape or the measured critical dimension of the pattern.
Public/Granted literature
- US09396911B2 Determination method, control method, determination apparatus, pattern forming system and program Public/Granted day:2016-07-19
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