发明申请
- 专利标题： SENSOR DEVICE WITH SEALING STRUCTURE
- 专利标题（中）： 具有密封结构的传感器装置
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申请号： US13091997申请日： 2011-04-21
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公开(公告)号： US20120266684A1公开(公告)日： 2012-10-25
- 发明人: Stephen R. Hooper , Dwight L. Daniels , James D. MacDonald , William G. McDonald , Chunlin C. Xia
- 申请人： Stephen R. Hooper , Dwight L. Daniels , James D. MacDonald , William G. McDonald , Chunlin C. Xia
- 申请人地址： US TX Austin
- 专利权人： Freescale Semiconductor, Inc.
- 当前专利权人： Freescale Semiconductor, Inc.
- 当前专利权人地址： US TX Austin
- 主分类号： G01L9/06
- IPC分类号： G01L9/06 ; G01L7/08
摘要：
Apparatus and related fabrication methods are provided for a sensor device. The sensor device includes a sensor structure including a first portion having a sensing arrangement formed thereon and a second structure. A sealing structure is interposed between the sensor structure and the second structure, wherein the sealing structure surrounds the first portion of the sensor structure. The sealing structure establishes a fixed reference pressure on a first side of the first portion, and an opposing side of the first portion is exposed to an ambient pressure.
公开/授权文献
- US08384168B2 Sensor device with sealing structure 公开/授权日：2013-02-26
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