Invention Application
- Patent Title: SPUTTERING TARGET-BACKING PLATE ASSEMBLY
- Patent Title (中): 喷射目标板组件
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Application No.: US13579606Application Date: 2011-02-16
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Publication No.: US20120318669A1Publication Date: 2012-12-20
- Inventor: Yuki Ikeda , Yuichiro Nakamura , Atsutoshi Arakawa
- Applicant: Yuki Ikeda , Yuichiro Nakamura , Atsutoshi Arakawa
- Applicant Address: JP Tokyo
- Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2010-035282 20100219
- International Application: PCT/JP2011/053211 WO 20110216
- Main IPC: C23C14/06
- IPC: C23C14/06 ; B05D5/12 ; B32B15/04 ; C23C14/08

Abstract:
Provided is a sputtering target-backing plate assembly where a raw material powder prepared so as to have the composition of a magnetic material sputtering target is filled in a die together with a backing plate and hot-pressed, thereby being bonded to the backing plate simultaneously with sintering of the magnetic material target powder.It is an object of the present invention to provide a sputtering target-backing plate assembly having a high average pass through flux and allowing more stable sputtering, by disposing the raw material powder for a target on the backing plate and sintering them.By simultaneously performing sintering and bonding, a sputtering target-backing plate assembly has a shorter manufacturing process, can shorten manufacturing period, and does not cause a problem of detachment due to an increase in temperature during sputtering. In addition, it is also an object of the present invention to provide a sputtering target-backing plate assembly at a reduced cost and with an improved average pass through flux (PTF).
Information query
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