发明申请
US20130010277A1 System and Method for Using a Two Part Cover and a Box for Protecting a Reticle
审中-公开
使用两部分盖子和保护标线盒的盒子的系统和方法
- 专利标题: System and Method for Using a Two Part Cover and a Box for Protecting a Reticle
- 专利标题(中): 使用两部分盖子和保护标线盒的盒子的系统和方法
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申请号: US13618204申请日: 2012-09-14
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公开(公告)号: US20130010277A1公开(公告)日: 2013-01-10
- 发明人: Santiago del Puerto , Erik R. Loopstra , Andrew Massar , Duane P. Kish , Abdullah Alikhan , Woodrow J. Olsen , Jonathan H. Feroce
- 申请人: Santiago del Puerto , Erik R. Loopstra , Andrew Massar , Duane P. Kish , Abdullah Alikhan , Woodrow J. Olsen , Jonathan H. Feroce
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 当前专利权人地址: NL Veldhoven
- 主分类号: G03B27/58
- IPC分类号: G03B27/58
摘要:
Systems and methods to protect a mask from being contaminated by airborne particles are described. The systems and methods include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
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