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    Lithographic apparatus, device manufacturing method, and device manufactured thereby
    2.
    发明授权
    Lithographic apparatus, device manufacturing method, and device manufactured thereby 有权
    平版印刷设备，器件制造方法和由此制造的器件

    公开(公告)号：US06721389B2

    公开(公告)日：2004-04-13

    申请号：US09934681

    申请日：2001-08-23

    Applicant: Jan E. Van Der Werf ,  Mark Kroon ,  Wilhelmus C. Keur ,  Vadim Y. Banine ,  Hans Van Der Laan ,  Johannes H. J. Moors ,  Erik R. Loopstra

    Inventor： Jan E. Van Der Werf ,  Mark Kroon ,  Wilhelmus C. Keur ,  Vadim Y. Banine ,  Hans Van Der Laan ,  Johannes H. J. Moors ,  Erik R. Loopstra

    IPC: G03F720

    CPC classification number: G03F7/70558 ,  G01J1/58 ,  G03F7/70741 ,  G03F7/7085 ,  G03F7/70916 ,  G03F7/70983

    Abstract: A lithographic projection apparatus includes a radiation system for providing a projection beam of radiation having a wavelength &lgr;1 smaller than 50 nm; a support structure for supporting patterning structure, the patterning structure serving to pattern the projection beam according to a desired pattern; a substrate table for holding a substrate; and a projection system for projecting the patterned beam onto a target portion of the substrate. The apparatus further includes a radiation sensor which is located so as to be able to receive radiation out of the projection beam, said sensor comprising a radiation-sensitive material which converts incident radiation of wavelength &lgr;1 into secondary radiation; and sensing means capable of detecting said secondary radiation emerging from said layer.

    Abstract translation: 光刻投影设备包括用于提供波长λ1小于50nm的辐射投射光束的辐射系统; 用于支撑图案形成结构的支撑结构，用于根据期望图案对投影光束进行图案化的图案形成结构; 用于保持衬底的衬底台; 以及用于将图案化的光束投影到基板的目标部分上的投影系统。 该装置还包括辐射传感器，其被定位成能够接收来自投影光束的辐射，所述传感器包括将波长λ1的入射辐射转换成二次辐射的辐射敏感材料; 以及能够检测从所述层出射的所述次级辐射的感测装置。

    Positioning device having two object holders
    3.
    发明授权
    Positioning device having two object holders 有权
    具有两个物体支架的定位装置

    公开(公告)号：US06262796B1

    公开(公告)日：2001-07-17

    申请号：US09180011

    申请日：1998-10-29

    Applicant: Erik R. Loopstra ,  Gerrit M. Bonnema ,  Harmen K. Van Der Schoot ,  Gerjan P. Veldhuis ,  Yim-Bun P. Kwan

    Inventor： Erik R. Loopstra ,  Gerrit M. Bonnema ,  Harmen K. Van Der Schoot ,  Gerjan P. Veldhuis ,  Yim-Bun P. Kwan

    IPC: G03B2742

    CPC classification number: G03F7/70733 ,  B23Q1/621 ,  B23Q1/623 ,  B23Q11/0032 ,  G03F7/70716 ,  G03F7/70741 ,  G03F7/7075 ,  G03F7/709 ,  H01L21/682

    Abstract: A positioning device has first and second object holders that are guided over a guiding surface extending parallel to an X-direction and parallel to a Y-direction perpendicular to the X-direction and which are displaceable over the guiding surface from a first position into a second position by means of a displacement system. The displacement system includes a first displacement unit and a second displacement unit to which the object holders can be alternately coupled. The first displacement unit is suitable for carrying out a first series of positioning steps of the first object holder in the first position and for displacing the first object holder from the first position into an intermediate position between the first and second positions. The second displacement unit is suitable for carrying out a second series of positioning steps of the second object holder in the second position, simultaneously with and independently of the first displacement unit, and for displacing the second object holder from the second position into the intermediate position. In the intermediate position, the object holders are exchanged, after which the first series of positioning steps can be carried out by the first displacement unit with the second object holder in the first position and the second series of positioning steps can be carried out by the second displacement unit with the first object holder in the second position. The positioning device is suitable for use in a lithographic device to carry out an exposure process with a first semiconductor substrate in an exposure position and, simultaneously therewith and independently thereof, a characterization process with a second semiconductor substrate in a characterization position.

    Abstract translation: 定位装置具有第一和第二物体保持器，所述第一和第二物体保持器被引导到平行于X方向并且平行于与X方向垂直的Y方向延伸的引导表面，并且其可以在引导表面上从第一位置移动到 通过位移系统的第二位置。 位移系统包括第一位移单元和第二位移单元，物体保持器可以交替地联接到该位移单元。 第一位移单元适于在第一位置执行第一物体保持器的第一系列定位步骤，并且用于将第一物体保持器从第一位置移动到第一位置和第二位置之间的中间位置。 第二位移单元适于在与第一位移单元同时且独立于第二位置执行第二对象保持器的第二系列定位步骤，并且用于将第二物体保持器从第二位置移动到中间位置 。 在中间位置，更换物体保持器，之后可以通过第一位移单元执行第一系列定位步骤，使第二物体保持器处于第一位置，并且第二系列定位步骤可以由 第二位移单元，其中第一对象保持器处于第二位置。 该定位装置适用于光刻设备，以在曝光位置中与第一半导体衬底进行曝光处理，并且同时进行曝光处理，并且独立于此，具有表征位置的第二半导体衬底的表征过程。

    Supporting device provided with a gas spring with a gas bearing, and lithographic device provided with such supporting devices
    4.
    发明授权
    Supporting device provided with a gas spring with a gas bearing, and lithographic device provided with such supporting devices 失效
    配备有气体轴承的气弹簧的支撑装置以及设置有该支撑装置的光刻装置

    公开(公告)号：US06226075B1

    公开(公告)日：2001-05-01

    申请号：US09110612

    申请日：1998-07-06

    Applicant: Erik R. Loopstra ,  Peter Heiland

    Inventor： Erik R. Loopstra ,  Peter Heiland

    IPC: G03B2762

    CPC classification number: F16C32/06 ,  F16C32/0603 ,  F16F15/022 ,  F16F15/0232 ,  G03F7/70691 ,  G03F7/70825

    Abstract: A supporting device (53) provided with a first part (69), a second part (71), and a gas spring (73) for supporting the second part relative to the first part parallel to a support direction (Z). The gas spring (73) comprises a pressure chamber (75) which is provided in an intermediate part (79) and is bounded by a piston (81) which is displaceable in the intermediate part (79) parallel to the support direction and is supported perpendicularly to the support direction by means of a static gas bearing (85). A stiffness of the supporting device parallel to the support direction is thus substantially entirely determined by a stiffness of the gas spring, and a low stiffness can be achieved through a suitable design of the gas spring. A transmission of vibrations directed parallel to the support direction from the first part to the second part is prevented as much as possible thereby. The invention also relates to a lithography device having a plurality of such supporting devices.

    Abstract translation: 具有第一部分（69），第二部分（71）和用于相对于第一部分平行于支撑方向（Z）支撑第二部分的气体弹簧（73）的支撑装置（53）。 气弹簧（73）包括设置在中间部分（79）中且由中间部分（79）平行于支撑方向移动的活塞（81）限定的压力室（75），并被支撑 通过静态气体轴承（85）垂直于支撑方向。 因此，平行于支撑方向的支撑装置的刚度基本上完全由气弹簧的刚度决定，并且可以通过气弹簧的适当设计来实现低刚度。 尽可能地防止从第一部分到第二部分平行于支撑方向引导的振动的传递。 本发明还涉及具有多个这种支撑装置的光刻装置。

    Actuator and transducer
    9.
    发明授权
    Actuator and transducer 失效

    公开(公告)号：US06791443B2

    公开(公告)日：2004-09-14

    申请号：US10704972

    申请日：2003-11-12

    Applicant: Erik R. Loopstra

    Inventor： Erik R. Loopstra

    IPC: H01F708

    CPC classification number: G03F7/70758 ,  H01J2237/0458 ,  H01J2237/31794 ,  H02K41/0354 ,  H02K2201/18

    Abstract: An actuator comprises a magnet yoke and a carrier member movable relative to the magnet yoke. The magnet yoke has at least one permanent magnet and the carrier member is positioned in the magnetic field produced by this magnet. The carrier member has an auxiliary magnetic member that produces a relative bias force between the carrier member and the magnet yoke. The bias force will be used to compensate for a weight applied to the device and acts as a bearing with a very large compliance. The carrier member also comprises a coil. Passing current through the coil produces a Lorentz force for further control of the actuator; alternatively, the device provides a velocity transducer by sensing the EMF generated in the coil by relative motion of the carrier member and magnet yoke.

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