Invention Application
US20130065796A1 Advanced Mixing System for Integrated Tool Having Site-Isolated Reactors
审中-公开
具有现场隔离反应堆的集成工具的高级混合系统
- Patent Title: Advanced Mixing System for Integrated Tool Having Site-Isolated Reactors
- Patent Title (中): 具有现场隔离反应堆的集成工具的高级混合系统
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Application No.: US13664119Application Date: 2012-10-30
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Publication No.: US20130065796A1Publication Date: 2013-03-14
- Inventor: Aaron T. Francis , Tony P. Chiang , John Schmidt , Kurt H. Weiner
- Applicant: INTERMOLECULAR, INC.
- Applicant Address: US CA San Jose
- Assignee: INTERMOLECULAR, INC.
- Current Assignee: INTERMOLECULAR, INC.
- Current Assignee Address: US CA San Jose
- Main IPC: C40B60/00
- IPC: C40B60/00
Abstract:
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
Information query
