公开(公告)号：US20130065796A1

公开(公告)日：2013-03-14

申请号：US13664119

申请日：2012-10-30

Applicant: INTERMOLECULAR, INC.

Inventor： Aaron T. Francis ,  Tony P. Chiang ,  John Schmidt ,  Kurt H. Weiner

IPC: C40B60/00

CPC classification number: C23C16/45514 ,  C23C16/45574 ,  C23C16/52 ,  H01L21/67017 ,  H01L21/67276 ,  Y10S438/907 ,  Y10S438/908 ,  Y10S438/913 ,  Y10T137/4673 ,  Y10T137/469 ,  Y10T137/87249 ,  Y10T137/87265 ,  Y10T137/87281

Abstract: An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.

Abstract translation: 描述了一种集成处理工具，其包括全晶片处理模块和组合处理模块。 用于组合处理模块的化学品从包括一组第一歧管的递送系统进料。 每个第一歧管的输出端连接至至少一个混合容器。 每个混合容器的输出馈送一组第二歧管中的多于一个。 每组第二歧管的输出馈送组合处理模块的多个位置隔离反应器中的一个。

公开(公告)号：US20140133265A1

公开(公告)日：2014-05-15

申请号：US13673560

申请日：2012-11-09

Applicant: INTERMOLECULAR, INC.

Inventor： Aaron T. Francis ,  Peter Satitpunwaycha ,  John Schmidt

IPC: B01F13/08

CPC classification number: B01F13/0863

Abstract: Provided are liquid agitating systems having magnetically actuated agitating members that do not come in contact with internal surfaces of liquid holding vessels. As such, some mechanically weak materials, such as polytetrafluoroethylene and perfluoroalkoxy polymer, may be used for internal surfaces of these vessels. An agitating member may be held by a supporting member that allows the agitating member to move within a vessel without touching its bottom. The supporting member effectively controls the distance between the agitating member and some supporting point. An external magnet provided under the vessel may be used for magnetic actuation. The agitating member includes an internal magnet that is magnetically coupled to the external magnet and that follows the path of the external magnet thereby moving the agitating member and agitating the liquid. In some embodiments, multiple external magnets may be used to position one or more agitating member.

Abstract translation: 提供了具有不与液体保持容器的内表面接触的具有磁力驱动的搅拌构件的液体搅拌系统。 因此，可以使用一些机械弱的材料，例如聚四氟乙烯和全氟烷氧基聚合物，用于这些容器的内表面。 搅拌构件可以由允许搅拌构件在容器内移动而不接触其底部的支撑构件保持。 支撑构件有效地控制搅拌构件与一些支撑点之间的距离。 设置在容器下方的外部磁体可用于磁致动。 搅拌构件包括磁耦合到外部磁体并且沿着外部磁体的路径的内部磁体，从而移动搅拌构件并搅拌液体。 在一些实施例中，可以使用多个外部磁体来定位一个或多个搅拌构件。