发明申请
- 专利标题: Die Bonder and Bonding Method
- 专利标题(中): Die Bonder和Bonding Method
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申请号: US13415920申请日: 2012-03-09
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公开(公告)号: US20130068826A1公开(公告)日: 2013-03-21
- 发明人: Hiroshi Maki , Masayuki Mochizuki , Yukio Tani , Takehito Mochizuki
- 申请人: Hiroshi Maki , Masayuki Mochizuki , Yukio Tani , Takehito Mochizuki
- 申请人地址: JP Kumagaya-shi
- 专利权人: Hitachi High-Tech Instruments Co., Ltd.
- 当前专利权人: Hitachi High-Tech Instruments Co., Ltd.
- 当前专利权人地址: JP Kumagaya-shi
- 优先权: JP2011-202275 20110915
- 主分类号: B23K31/02
- IPC分类号: B23K31/02 ; B23K37/04
摘要:
A die bonder includes a die supply stage, which is configured to hold a wafer; a first head having a first collet, which is configured to pick up a die from the wafer and to attach the die, provisionally, on a target to be conducted with mounting thereon, on the attach stage; a second head having a second collet, which is configured to conduct main compression of the die, which is provisionally attached on the attach stage, on the target to be conducted with mounting; and a controller apparatus, wherein the controller apparatus controls the first head to pick up a next die from the die supply stage, during when the second head conducts the main compression on the die onto the target to be conducted with mounting, thereby achieving the die bonder and the die bonding method being stable in quality.
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