发明申请
- 专利标题： Plasma-Tuning Rods in Surface Wave Antenna (SWA) Sources
- 专利标题（中）： 等离子体调谐棒在表面波天线（SWA）来源
-
申请号： US13249418申请日： 2011-09-30
-
公开(公告)号： US20130084706A1公开(公告)日： 2013-04-04
- 发明人: Jianping Zhao , Lee Chen , Merritt Funk , Toshihiko Iwao , Peter L.G. Ventzek
- 申请人： Jianping Zhao , Lee Chen , Merritt Funk , Toshihiko Iwao , Peter L.G. Ventzek
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 主分类号： H01L21/311
- IPC分类号： H01L21/311 ; H01L21/3065
摘要：
The invention provides a plurality of Surface Wave Antenna (SWA) plasma sources. The SWA plasma sources can comprise one or more non-circular slot antennas, each having a plurality of plasma-tuning rods extending therethrough. Some of the plasma tuning rods can be configured to couple the electromagnetic (EM) energy from one or more of the non-circular slot antennas to the process space within the process chamber. The invention also provides SWA plasma sources that can comprise a plurality of resonant cavities, each having one or more plasma-tuning rods extending therefrom. Some of the plasma tuning rods can be configured to couple the EM energy from one or more of the resonant cavities to the process space within the process chamber.
信息查询
IPC分类:
