发明申请
- 专利标题: MOSFET AND METHOD FOR MANUFACTURING THE SAME
- 专利标题(中): MOSFET及其制造方法
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申请号: US13510407申请日: 2011-11-18
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公开(公告)号: US20130093002A1公开(公告)日: 2013-04-18
- 发明人: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人: Huilong Zhu , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人地址: CN Beijing
- 专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- 当前专利权人地址: CN Beijing
- 优先权: CN201110308827.5 20111012
- 国际申请: PCT/CN2011/082417 WO 20111118
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/78
摘要:
The present disclosure discloses a MOSFET and a method for manufacturing the same, wherein the MOSFET comprises: an SOI wafer comprising a semiconductor substrate, a buried insulating layer on the semiconductor substrate, and a semiconductor layer on the buried insulating layer; a gate stack on the semiconductor layer; a source region and a drain region in the semiconductor layer on both sides of the gate stack; and a channel region in the semiconductor layer and located between the source region and the drain region, wherein the MOSFET further comprises a back gate which is located in the semiconductor substrate and has a first doped region as a lower portion of the back gate and a second doped region as an upper portion of the back gate, and the second doped region of the back gate is self-aligned with the gate stack. The MOSFET can adjust a threshold voltage by changing doping type and doping concentration of the back gate.
公开/授权文献
- US10096717B2 MOSFET and method for manufacturing the same 公开/授权日:2018-10-09
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