Invention Application
- Patent Title: BLANKET SHORT CHANNEL ROLL-UP IMPLANT WITH NON-ANGLED LONG CHANNEL COMPENSATING IMPLANT THROUGH PATTERNED OPENING
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Application No.: US13289051Application Date: 2011-11-04
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Publication No.: US20130113050A1Publication Date: 2013-05-09
- Inventor: James W. Adkisson , Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant: James W. Adkisson , Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L29/772
- IPC: H01L29/772 ; H01L21/336

Abstract:
A method that forms a structure implants a well implant into a substrate, patterns a mask on the substrate (to have at least one opening that exposes a channel region of the substrate) and forms a conformal dielectric layer on the mask and to line the opening. The conformal dielectric layer covers the channel region of the substrate. The method also forms a conformal gate metal layer on the conformal dielectric layer, implants a compensating implant through the conformal gate metal layer and the conformal dielectric layer into the channel region of the substrate, and forms a gate conductor on the conformal gate metal layer. Additionally, the method removes the mask to leave a gate stack on the substrate, forms sidewall spacers on the gate stack, and then forms source/drain regions in the substrate partially below the sidewall spacers.
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