- 专利标题: IMAGE SENSOR TRENCH ISOLATION WITH CONFORMAL DOPING
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申请号: US13290733申请日: 2011-11-07
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公开(公告)号: US20130113061A1公开(公告)日: 2013-05-09
- 发明人: Chih-Yu Lai , Yeur-Luen Tu , Chih-Hui Huang , Cheng-Ta Wu , Chia-Shiung Tsai , Luan C. Tran
- 申请人: Chih-Yu Lai , Yeur-Luen Tu , Chih-Hui Huang , Cheng-Ta Wu , Chia-Shiung Tsai , Luan C. Tran
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L31/18 ; H01L31/0232
摘要:
Provided is a semiconductor image sensor device. The image sensor device includes a substrate. The image sensor device includes a first pixel and a second pixel disposed in the substrate. The first and second pixels are neighboring pixels. The image sensor device includes an isolation structure disposed in the substrate and between the first and second pixels. The image sensor device includes a doped isolation device disposed in the substrate and between the first and second pixels. The doped isolation device surrounds the isolation structure in a conformal manner.
公开/授权文献
- US08853811B2 Image sensor trench isolation with conformal doping 公开/授权日:2014-10-07
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