Invention Application
- Patent Title: IMAGE SENSOR TRENCH ISOLATION WITH CONFORMAL DOPING
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Application No.: US13290733Application Date: 2011-11-07
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Publication No.: US20130113061A1Publication Date: 2013-05-09
- Inventor: Chih-Yu Lai , Yeur-Luen Tu , Chih-Hui Huang , Cheng-Ta Wu , Chia-Shiung Tsai , Luan C. Tran
- Applicant: Chih-Yu Lai , Yeur-Luen Tu , Chih-Hui Huang , Cheng-Ta Wu , Chia-Shiung Tsai , Luan C. Tran
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/18 ; H01L31/0232

Abstract:
Provided is a semiconductor image sensor device. The image sensor device includes a substrate. The image sensor device includes a first pixel and a second pixel disposed in the substrate. The first and second pixels are neighboring pixels. The image sensor device includes an isolation structure disposed in the substrate and between the first and second pixels. The image sensor device includes a doped isolation device disposed in the substrate and between the first and second pixels. The doped isolation device surrounds the isolation structure in a conformal manner.
Public/Granted literature
- US08853811B2 Image sensor trench isolation with conformal doping Public/Granted day:2014-10-07
Information query
IPC分类: