发明申请
- 专利标题: Method for Forming a Graded Matching Layer Structure
- 专利标题(中): 形成渐变匹配层结构的方法
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申请号: US13362096申请日: 2012-01-31
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公开(公告)号: US20130195333A1公开(公告)日: 2013-08-01
- 发明人: Prabhjot Singh , Lowell Scott Smith
- 申请人: Prabhjot Singh , Lowell Scott Smith
- 申请人地址: US NY SCHENECTADY
- 专利权人: GENERAL ELECTRIC COMPANY
- 当前专利权人: GENERAL ELECTRIC COMPANY
- 当前专利权人地址: US NY SCHENECTADY
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G10K11/00 ; B05D5/12 ; H01L41/04
摘要:
A method for forming a graded matching layer structure is presented. The method includes (a) depositing a first material slurry on at least a portion of a substrate, (b) spreading the first material slurry to a form a first material layer having a first determined thickness, (c) exposing the first material layer using light processed through a determined light pattern mask to form a first matching layer, and (d) repeating steps (a)-(c) with different material slurries to form the graded matching layer structure.