发明申请
US20130197858A1 METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL ROTATION RATE SENSOR BY MEANS OF SIGMA-DELTA-MODULATION
有权
用于通过SIGMA-DELTA调制方法解决微机电转速传感器的平坦度和谐振频率的方法
- 专利标题： METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL ROTATION RATE SENSOR BY MEANS OF SIGMA-DELTA-MODULATION
- 专利标题（中）： 用于通过SIGMA-DELTA调制方法解决微机电转速传感器的平坦度和谐振频率的方法
-
申请号： US13634585申请日： 2011-03-17
-
公开(公告)号： US20130197858A1公开(公告)日： 2013-08-01
- 发明人: Markus Egretzberger , Andreas Kugi , Florian Mair , Michael Maurer , Yiannos Manoli , Thomas Northemann
- 申请人： Markus Egretzberger , Andreas Kugi , Florian Mair , Michael Maurer , Yiannos Manoli , Thomas Northemann
- 申请人地址： DE Freiburg DE Frankfurt
- 专利权人： Albert-Ludwigs-University of Freiburg,Continental Teves AG & Co. oHG
- 当前专利权人： Albert-Ludwigs-University of Freiburg,Continental Teves AG & Co. oHG
- 当前专利权人地址： DE Freiburg DE Frankfurt
- 优先权： DE102010011781.1 20100317
- 国际申请： PCT/EP11/54090 WO 20110317
- 主分类号： G01P3/14
- IPC分类号： G01P3/14
摘要：
A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
公开/授权文献
信息查询
IPC分类:
