Invention Application
US20130197858A1 METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL ROTATION RATE SENSOR BY MEANS OF SIGMA-DELTA-MODULATION
有权
用于通过SIGMA-DELTA调制方法解决微机电转速传感器的平坦度和谐振频率的方法
- Patent Title: METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL ROTATION RATE SENSOR BY MEANS OF SIGMA-DELTA-MODULATION
- Patent Title (中): 用于通过SIGMA-DELTA调制方法解决微机电转速传感器的平坦度和谐振频率的方法
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Application No.: US13634585Application Date: 2011-03-17
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Publication No.: US20130197858A1Publication Date: 2013-08-01
- Inventor: Markus Egretzberger , Andreas Kugi , Florian Mair , Michael Maurer , Yiannos Manoli , Thomas Northemann
- Applicant: Markus Egretzberger , Andreas Kugi , Florian Mair , Michael Maurer , Yiannos Manoli , Thomas Northemann
- Applicant Address: DE Freiburg DE Frankfurt
- Assignee: Albert-Ludwigs-University of Freiburg,Continental Teves AG & Co. oHG
- Current Assignee: Albert-Ludwigs-University of Freiburg,Continental Teves AG & Co. oHG
- Current Assignee Address: DE Freiburg DE Frankfurt
- Priority: DE102010011781.1 20100317
- International Application: PCT/EP11/54090 WO 20110317
- Main IPC: G01P3/14
- IPC: G01P3/14

Abstract:
A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
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